HIGH-CURRENT ION-SOURCE

被引:220
作者
BROWN, IG
GAVIN, JE
MACGILL, RA
机构
关键词
D O I
10.1063/1.96163
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:358 / 360
页数:3
相关论文
共 26 条
[21]  
ROSING MG, 1958, J APPL PHYS, V57, P816
[22]   METAL-ION SOURCE USING RF DISCHARGE COMBINED WITH SPUTTERING [J].
SAITO, Y ;
MITSUOKA, Y ;
SUGANOMATA, S .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (11) :1760-1762
[23]  
Valyi L, 1977, ATOM ION SOURCES
[24]   PRODUCTION OF A DENSE LOW-ENERGY POSITIVE HYDROGEN-ION BEAM [J].
VANBOMMEL, PJM ;
MASSMANN, P ;
GRANNEMAN, EHA ;
HOPMAN, HJ ;
LOS, J .
VACUUM, 1984, 34 (1-2) :25-29
[25]  
1974, 2ND P S ION SOURC FO
[26]  
1983, IEEE T PLASMA SCI, V11