IMPROVED FABRICATION TECHNIQUES FOR INFRARED BOLOMETERS

被引:58
作者
LANGE, AE
KREYSA, E
MCBRIDE, SE
RICHARDS, PL
HALLER, EE
机构
[1] UNIV CALIF BERKELEY,DEPT MAT SCI,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,DIV MAT & MOLEC RES,BERKELEY,CA 94720
来源
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES | 1983年 / 4卷 / 05期
关键词
D O I
10.1007/BF01009690
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:689 / 706
页数:18
相关论文
共 16 条
[1]   SUPERCONDUCTIVE BOLOMETERS FOR SUBMILLIMETER WAVELENGTHS [J].
CLARKE, J ;
HOFFER, GI ;
RICHARDS, PL ;
YEH, NH .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (12) :4865-4879
[2]  
DOWNEY PM, 1980, THESIS MASSACHUSETTS
[3]   GE-GA PHOTOCONDUCTORS IN LOW INFRARED BACKGROUNDS [J].
HALLER, EE ;
HUESCHEN, MR ;
RICHARDS, PL .
APPLIED PHYSICS LETTERS, 1979, 34 (08) :495-497
[4]  
HOLLAND L, 1960, VACUUM DEPOSITION TH, P155
[5]  
HUIJER P, 1962, PHILIPS TECH REV, V24, P144
[6]  
LAKSHAMANAN TK, 1961, 8TH T NAT VAC S, P868
[7]   LOW-TEMPERATURE GERMANIUM BOLOMETER [J].
LOW, FJ .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1961, 51 (11) :1300-&
[8]   THE DETECTIVITY OF CRYOGENIC BOLOMETERS [J].
LOW, FJ ;
HOFFMAN, AR .
APPLIED OPTICS, 1963, 2 (06) :649-650
[9]  
MAISSEL LI, 1970, HDB THIN FILM TECHNO, P18
[10]   BOLOMETER NOISE - NON-EQUILIBRIUM THEORY [J].
MATHER, JC .
APPLIED OPTICS, 1982, 21 (06) :1125-1129