SOLVENTLESS POLYIMIDE FILMS BY VAPOR-DEPOSITION

被引：209

作者：

SALEM, JR ^{[1
]}

SEQUEDA, FO ^{[1
]}

DURAN, J ^{[1
]}

LEE, WY ^{[1
]}

YANG, RM ^{[1
]}

机构：

[1] IBM CORP,DIV GEN TECHNOL,E FISHKILL,NY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573930

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：369 / 374

页数：6

共 16 条

[1]

ADROVA N, 1970, POLYMIDES NEW GLASS

[2]

BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537

[3]

COTTS PM, 1984, POLYIMIDES SYNTHESIS, V1, P223

[4]

Gupta M., UNPUB

[5]

HIROAKA H, 1984, J ELECTROCHEM SOC, V131, P2938

[6]

Leary H. J. Jr., 1979, Surface and Interface Analysis, V1, P75, DOI 10.1002/sia.740010302

[7]

LEARY HJ, 1982, P S CHARACTERIZATION

[8] PROPERTIES OF THIN POLYIMIDE FILMS [J].

ROTHMAN, LB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (10) :2216-2220

[9] INPLANE ORIENTATION OF POLYIMIDE [J].

RUSSELL, TP ;

GUGGER, H ;

SWALEN, JD .

JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 1983, 21 (09) :1745-1756

[10] AROMATIC POLYPYROMELLITIMIDES FROM AROMATIC POLYAMIC ACIDS [J].

SROOG, CE ;

ENDREY, AL ;

ABRAMO, SV ;

BERR, CE ;

EDWARDS, WM ;

OLIVIER, KL .

JOURNAL OF POLYMER SCIENCE PART A-GENERAL PAPERS, 1965, 3 (4PA) :1373-&

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