SOLVENTLESS POLYIMIDE FILMS BY VAPOR-DEPOSITION

被引：209
|
作者：
SALEM, JR [1 ]
SEQUEDA, FO [1 ]
DURAN, J [1 ]
LEE, WY [1 ]
YANG, RM [1 ]
机构：
[1] IBM CORP,DIV GEN TECHNOL,E FISHKILL,NY
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573930
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：369 / 374
页数：6
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