MEASUREMENT OF THE SPUTTERING YIELD FOR AR+ AND AR2+ IONS ON GOLD-FILMS

被引：5

作者：

FITCH, RK

MAHMOUD, EA

机构：

来源：

THIN SOLID FILMS | 1982年 / 87卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90291-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：379 / 383

页数：5

共 10 条

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