PROBING SEMICONDUCTOR INTERFACES BY TRANSMISSION ELECTRON-MICROSCOPY

被引:0
作者
STEEDS, JW
CHERNS, D
机构
来源
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1993年 / 344卷 / 1673期
关键词
D O I
10.1098/rsta.1993.0107
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The aim of this article is to review the many available techniques in transmission electron microscopy, drawing attention to their particular characteristics and strengths. Where techniques are well established, the reader is referred to standard reference texts. Greater detail is given about new and emerging techniques which hold promise for even more detailed future study of semiconductor interfaces.
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页码:545 / 556
页数:12
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共 41 条
  • [1] DIRECT IMAGING OF THE COLUMNAR STRUCTURE OF GAAS QUANTUM WELLS
    BIMBERG, D
    CHRISTEN, J
    FUKUNAGA, T
    NAKASHIMA, H
    MARS, DE
    MILLER, JN
    [J]. SUPERLATTICES AND MICROSTRUCTURES, 1988, 4 (03) : 257 - 263
  • [2] SENSITIVITY AND ACCURACY OF CBED PATTERN-MATCHING
    BIRD, DM
    SAUNDERS, M
    [J]. ULTRAMICROSCOPY, 1992, 45 (02) : 241 - 251
  • [3] CONVERGENT BEAM DIFFRACTION STUDIES OF INTERFACES, DEFECTS, AND MULTILAYERS
    CHERNS, D
    PRESTON, AR
    [J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1989, 13 (02): : 111 - 122
  • [4] CONVERGENT BEAM ELECTRON-DIFFRACTION STUDIES OF STRAIN IN SI/SIGE SUPERLATTICES
    CHERNS, D
    TOUAITIA, R
    PRESTON, AR
    ROSSOUW, CJ
    HOUGHTON, DC
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1991, 64 (03): : 597 - 612
  • [5] CONVERGENT-BEAM ELECTRON-DIFFRACTION FROM ALGAAS/GAAS SINGLE QUANTUM WELLS
    CHERNS, D
    JORDAN, IK
    VINCENT, R
    [J]. PHILOSOPHICAL MAGAZINE LETTERS, 1988, 58 (01) : 45 - 51
  • [6] CHERNS D, 1986, 11TH P INT C EL MICR, V2, P1463
  • [7] CHERNS D, 1991, INST PHYS CONF SER, P549
  • [8] CHOU CT, 1993, P INT C MICROSCOPY S
  • [9] COHERENT INTERFERENCE IN CONVERGENT-BEAM ELECTRON-DIFFRACTION AND SHADOW IMAGING
    COWLEY, JM
    [J]. ULTRAMICROSCOPY, 1979, 4 (04) : 435 - 450
  • [10] ELECTRON HOLOGRAPHIC OBSERVATIONS OF THE ELECTROSTATIC-FIELD ASSOCIATED WITH THIN REVERSE-BIASED P-N-JUNCTIONS
    FRABBONI, S
    MATTEUCCI, G
    POZZI, G
    VANZI, M
    [J]. PHYSICAL REVIEW LETTERS, 1985, 55 (20) : 2196 - 2199