SEPARATION AND DETERMINATION OF THE INTERFACE AND OXIDE TRAP DENSITIES IN MOS STRUCTURES BY THE TRANSIENT CURRENT TECHNIQUE

被引：0

作者：

KHOI, PH ^{[1
]}

MINH, PN ^{[1
]}

BINH, LTT ^{[1
]}

DUNG, HA ^{[1
]}

TUYEN, LTT ^{[1
]}

机构：

[1] NATL CTR SCI RES VIETNAM,INST PHYS,HANOI,VIETNAM

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1993年 / 135卷 / 02期

关键词：

D O I：

10.1002/pssa.2211350243

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：K91 / K95

页数：5

共 10 条

[1] APPLICATION OF TRIANGULAR VOLTAGE SWEEP METHOD TO MOBILE CHARGE STUDIES IN MOS STRUCTURES [J].

CHOU, NJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (04) :601-&

[2] ELECTRICAL-PROPERTIES OF THIN ANODIC SILICON DIOXIDE LAYERS GROWN IN PURE WATER [J].

GASPARD, F ;

HALIMAOUI, A ;

SARRABAYROUSE, G .

REVUE DE PHYSIQUE APPLIQUEE, 1987, 22 (01) :65-69

[3] ELECTRON INJECTION AND TRAP FILLING IN INSULATING LAYERS [J].

KRAUSE, H .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 36 (02) :705-715

[4] CHARGE INJECTION INTO SIO2-FILMS AT FIELDS BETWEEN 1-MV AND 3-MV CM-1 AFTER ELECTRICAL STRESS [J].

KRAUSE, H ;

BAR, HP .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 110 (02) :537-547

[5] TUNNELING TO TRAPS IN INSULATORS [J].

LUNDSTROM, I ;

SVENSSON, C .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :5045-5047

[6] DIELECTRIC LOSS, ELECTRODE DETERIORATION, AND SODIUM PROBLEM IN MOS STRUCTURES [J].

SILVERSMITH, DJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (01) :121-+

[7] THEORY OF NON-STEADY-STATE INTERFACIAL THERMAL CURRENTS IN MOS DEVICES, AND DIRECT DETERMINATION OF INTERFACIAL TRAP PARAMETERS [J].

SIMMONS, JG ;

TAYLOR, GW .

SOLID-STATE ELECTRONICS, 1974, 17 (02) :125-130

[8] THEORY OF TRANSIENT EMISSION CURRENT IN MOS DEVICES AND DIRECT DETERMINATION INTERFACE TRAP PARAMETERS [J].

SIMMONS, JG ;

WEI, LS .

SOLID-STATE ELECTRONICS, 1974, 17 (02) :117-124

[9] TRANSIENT ISOTHERMAL GENERATION AT SILICON-SILICON OXIDE INTERFACE AND DIRECT DETERMINATION OF INTERFACE TRAP DISTRIBUTION [J].

SIMMONS, JG ;

MAR, HA .

SOLID-STATE ELECTRONICS, 1976, 19 (05) :369-374

[10]

WITCZAK SC, 1992, SOLID STATE ELECTRIN, V35, P34

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