MASS-SPECTROMETRIC ANALYSIS OF VAPORS IN OXIDATION OF SI3N4 COMPACTS

被引:17
|
作者
LIN, SS [1 ]
机构
[1] USA,MAT & MECH RES CTR,WATERTOWN,MA 02072
关键词
Compendex;
D O I
10.1111/j.1151-2916.1975.tb19596.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
SILICON COMPOUNDS
引用
收藏
页码:160 / 160
页数:1
相关论文
共 28 条
  • [1] Electrical instabilities in amorphous InGaZnO thin film transistors with Si3N4 and Si3N4/Al2O 3 gate dielectrics
    Kim, Yu-Mi
    Jeong, Kwang-Seok
    Yun, Ho-Jin
    Yang, Seung-Dong
    Lee, Sang-Youl
    Lee, Hi-Deok
    Lee, Ga-Won
    Japanese Journal of Applied Physics, 2012, 51 (9 PART3)
  • [2] IONIZER FOR MASS-SPECTROMETRIC ANALYSIS OF THE NEUTRAL COMPONENT OF A PLASMA.
    Chernyak, V.Ya.
    Instruments and experimental techniques New York, 1980, 23 (1 pt 2): : 196 - 197
  • [3] MOLTEN-SALT DEGRADATION OF SI3N4 CERAMICS
    BOURNE, WC
    TRESSLER, RE
    AMERICAN CERAMIC SOCIETY BULLETIN, 1980, 59 (04): : 443 - &
  • [4] Structural imperfection of >-Si3N4 crystals associated with nucleation
    Xu, Fang-Fang
    Bando, Yoshio
    Zhang, Ming
    Wang, Chang-Meng
    Mitomo, Mamoru
    Microscopy, 2001, 50 (03): : 265 - 269
  • [5] THERMALLY STIMULATED DEPOLARIZATION CURRENTS IN Si3N4 FILMS.
    Volkov, S.A.
    Zhmurikov, E.I.
    Neizvestnyi, I.G.
    Ovsyuk, V.N.
    Soviet Microelectronics (English Translation of Mikroelektronika), 1979, 8 (05): : 342 - 345
  • [6] VALIDITY OF MASS-SPECTROMETRIC MEASUREMENTS AT PRESSURES EXCEEDING 10-4 MBAR
    HUBER, WK
    RETTINGHAUS, G
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 681 - 684
  • [7] Refinement of β-Si3N4 single crystal grown from silicon melt
    Yamamoto, Yoshinobu
    Hirosaki, Naoto
    Ishikawa, Ichiro
    Ye, Jiping
    Matsuo, Kazuo
    Furuya, Kenji
    Munakata, Fumio
    Akimune, Yoshio
    Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, 2000, 108 (1257): : 515 - 517
  • [8] FEATURES OF A PROCEDURE FOR THE MASS-SPECTROMETRIC ANALYSIS OF THE VOLATILE PRODUCTS LIBERATED IN THE HEATING OF COALS.
    Kekin, N.A.
    Vodolazhchenko, V.V.
    Shmal'ko, V.N.
    Solid Fuel Chemistry, 1979, 13 (04): : 76 - 82
  • [9] Study on fretting characteristics of Si3N4/NS315 alloy at high temperature
    Li, Gen
    Liu, Han-Wei
    Ren, Ping-Di
    Zhang, Xiao-Yu
    Hedongli Gongcheng/Nuclear Power Engineering, 2013, 34 (04): : 171 - 175
  • [10] HIGH TEMPERATURE HARDNESS OF Si3N4 CERAMICS FABRICATED UNDER HIGH PRESSURE.
    Yamada, Tetsuo
    Tanaka, Atsuhiko
    Shimada, Masahiko
    Koizumi, Mitsue
    Yogyo Kyokai Shi/Journal of the Ceramic Society of Japan, 1982, 90 (1040): : 202 - 208