SELF-ALIGNED POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS BY LASER IMPLANTATION

被引：4
|
作者：
COXON, P
LLOYD, M
MIGLIORATO, P
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 26期
关键词：
D O I：
10.1063/1.96786
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1785 / 1786
页数：2
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