RESIDUAL LATTICE DISORDER IN SELF-IMPLANTED SILICON AFTER PULSED LASER IRRADIATION

被引：17
作者：
SERVIDORI, M
ZANI, A
GARULLI, G
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 70卷 / 02期
关键词：
D O I：
10.1002/pssa.2210700239
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：691 / 701
页数：11
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