SUBMICROMETER RESOLUTION REPLICATION OF RELIEF PATTERNS FOR INTEGRATED OPTICS

被引：36

作者：

AUMILLER, GD ^{[1
]}

CHANDROS.EA ^{[1
]}

TOMLINSO.WJ ^{[1
]}

WEBER, HP ^{[1
]}

机构：

[1] BELL TEL LABS INC,HOLMDEL,NJ 07733

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 10期

关键词：

D O I：

10.1063/1.1663087

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4557 / 4562

页数：6

共 7 条

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[3]

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[4] SCATTERING EFFICIENCY OF HIGH-PERIODICITY DIELECTRIC GRATINGS - EXPERIMENT [J].

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WEBER, HP .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (06) :685-688

[5] EMBOSSED OPTICAL WAVEGUIDES [J].

ULRICH, R ;

TOMLINSON, WJ ;

WEBER, HP ;

CHANDROSS, EA ;

FRANKE, EA .

APPLIED PHYSICS LETTERS, 1972, 20 (06) :213-+

[6] LOSS MEASUREMENTS IN THIN-FILM OPTICAL WAVEGUIDES [J].

WEBER, HP ;

DUNN, FA ;

LEIBOLT, WN .

APPLIED OPTICS, 1973, 12 (04) :755-757

[7]

WEBER HP, 1972, IEEE J QUANTUM ELECT, VQE 8, P546

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