DISLOCATION DENSITY AND SHEET RESISTANCE VARIATIONS ACROSS SEMI-INSULATING GAAS WAFERS

被引：10
|
作者：
BLUNT, RT [1 ]
CLARK, S [1 ]
STIRLAND, DJ [1 ]
机构：
[1] UNIV CAMBRIDGE, QUEENS COLL, CAMBRIDGE, ENGLAND
来源：
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1982年 / 30卷 / 07期
关键词：
D O I：
10.1109/TMTT.1982.1131181
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：943 / 949
页数：7
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