OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS SI1-XGEX ALLOY THIN-FILMS PREPARED BY PLANAR MAGNETRON SPUTTERING

被引：18
|
作者：
SAITO, N
AOKI, K
SANNOMIYA, H
YAMAGUCHI, T
机构：
来源：
THIN SOLID FILMS | 1984年 / 115卷 / 04期
关键词：
D O I：
10.1016/0040-6090(84)90088-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：253 / 262
页数：10
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