VARIABLE-TEMPERATURE ULTRAHIGH-VACUUM ATOMIC-FORCE MICROSCOPE

被引:39
作者
DAI, Q [1 ]
VOLLMER, R [1 ]
CARPICK, RW [1 ]
OGLETREE, DF [1 ]
SALMERON, M [1 ]
机构
[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,DIV MAT SCI,BERKELEY,CA 94720
关键词
D O I
10.1063/1.1146097
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new atomic force microscope (AFM) that operates in ultrahigh vacuum (UHV) is described. The sample is held fixed with spring clamps while the AMF cantilever and deflection sensor are scanned above it. Thus, the sample is easily coupled to a liquid nitrogen cooled thermal reservoir which allows AFM operation from approximate to 100 K to room temperature. AFM operation above room temperature is also possible. The microscope head is capable of coarse x-y positioning over millimeter distances so that AFM images can be taken virtually anywhere upon a macroscopic sample. The optical beam deflection scheme is used for detection, allowing simultaneous normal and lateral force measurements. The sample can be transferred from the AFM stage to a low energy electron diffraction/Auger electron spectrometer stage for surface analysis. Atomic lattice resolution AFM images taken in UHV are presented at 110, 296, and 430 K. (C) 1995 American Institute of Physics.
引用
收藏
页码:5266 / 5271
页数:6
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