ETCHING OF (1 1 1) AS SURFACES OF GAAS WITH NITRIC-ACID

被引:4
作者
WEISS, BL [1 ]
机构
[1] UNIV NEWCASTLE UPON TYNE,DEPT ELECT & ELECTR ENGN,NEWCASTLE TYNE NE1 7RU NE,NORTHUMBERLAND,ENGLAND
关键词
D O I
10.1007/BF00540890
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:1569 / 1571
页数:3
相关论文
共 2 条
[1]  
HARTNAGEL HL, 1974, J MATER SCI, V8, P1061
[2]   ETCHING OF GALLIUM ARSENIDE WITH NITRIC ACID [J].
KYSER, DF ;
MILLEA, MF .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (09) :1102-1104