ION MIXING AND RECOIL IMPLANTATION SIMULATIONS BY MEANS OF TRIDYN

被引：61

作者：

MOLLER, W

ECKSTEIN, W

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90448-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：645 / 649

页数：5

共 21 条

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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 727 - 734
[6] JIMINEZRODRIGUE.JJ, 1984, NUCL INSTRUM METH B, V2, P792
[7] Lindhard J., 1953, MAT FYS MEDD DAN VID, V27
[8] RECOIL MIXING IN SOLIDS BY ENERGETIC ION-BEAMS
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[9] ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION
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[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 53 - 61
[10] ION BEAM MIXING IN AMORPHOUS SILICON - 1. EXPERIMENTAL INVESTIGATION.
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[J]. Nuclear instruments and methods, 1981, 182 /183 (pt 1): : 43 - 51

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