STUDY OF GOLD ACCEPTOR IN A SILICON P+N JUNCTION AND AN N-TYPE MOS CAPACITOR BY THERMALLY STIMULATED CURRENT AND CAPACITANCE MEASUREMENTS

被引:34
作者
BUEHLER, MG [1 ]
PHILLIPS, WE [1 ]
机构
[1] NBS, INST APPL TECHNOL, WASHINGTON, DC 20234 USA
关键词
D O I
10.1016/0038-1101(76)90156-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:777 / +
页数:1
相关论文
共 14 条
[2]  
BUEHLER MG, 1973, SEMICONDUCTOR SILICO, P549
[3]  
BUEHLER MG, 1976, NBS40026 SPEC PUBL
[4]  
BUEHLER MG, 1974, NBS4006 SPEC PUBL
[5]  
BUEHLER MG, 1973, NBS806 TECHN NOT, P13
[7]   BULK LIFETIME DETERMINATION USING AN MOS CAPACITOR [J].
HUANG, JST .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (11) :1849-+
[8]   DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J].
LANG, DV .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3023-3032
[9]   PROPERTIES OF AU, PT, PD AND RH LEVELS IN SILICON MEASURED WITH A CONSTANT CAPACITANCE TECHNIQUE [J].
PALS, JA .
SOLID-STATE ELECTRONICS, 1974, 17 (11) :1139-1145
[10]  
PHILLIPS WE, 1974, NBS4001 SPEC PUBL, P16