0.5-MU-M X-RAY-LITHOGRAPHY - DEVELOPMENTS IN MICROSTRUCTURE PROCESSES

被引：0
|
作者：
GENTILI, M
PAOLETTI, A
PETROCCO, G
TUCCIARONE, A
机构：
[1] UNIV ROMA 2,DIPARTIMENTO FIS,I-00173 ROMA,ITALY
[2] UNIV REGGIO CALABRIA,FAC INGN,IST BIENNIO,I-89128 REGGIO CALABRIA,ITALY
来源：
NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS | 1988年 / 10卷 / 06期
关键词：
D O I：
10.1007/BF02451110
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：733 / 744
页数：12
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