CHARACTERIZATION OF HIGH-QUALITY GAINP/GAAS SUPERLATTICES GROWN ON GAAS AND SI SUBSTRATES BY GAS-SOURCE MOLECULAR-BEAM EPITAXY

被引:8
作者
JELEN, C [1 ]
SLIVKEN, S [1 ]
HE, XG [1 ]
RAZEGHI, M [1 ]
SHASTRY, S [1 ]
机构
[1] KOPIN CORP,TAUNTON,MA 02780
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期
关键词
D O I
10.1116/1.587059
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report an analysis of the heteroepitaxial interfaces in high quality GaInP-GaAs superlattices grown simultaneously on GaAs and Si substrates by gas source molecular beam epitaxy. These two superlattices have been studied using high resolution x-ray diffraction measurements. Sharp superlattice satellites, with very little broadening, are observed within a 6-degrees range for the sample on GaAs. Photoluminescence peaks with full widths at half-maximums of 5 and 7 meV are obtained at 4 K for samples with 58 angstrom wells on GaAs and Si, respectively. Room temperature exciton absorption is observed in the photovoltage measurements for a superlattice grown on Si substrate. The thicknesses determined by x-ray analysis are consistent with those obtained by a Kronig-Penny model fitting of the photovoltage spectroscopy.
引用
收藏
页码:1113 / 1115
页数:3
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