AUTOMATED PROCESSING OF PARALLEL-DETECTION EELS DATA

被引：22

作者：

KUNDMANN, MK ^{[1
]}

KRIVANEK, OL ^{[1
]}

机构：

[1] GATAN RES & DEV,PLEASANTON,CA 94588

来源：

MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1991年 / 2卷 / 2-3期

关键词：

D O I：

10.1051/mmm:0199100202-3024500

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An algorithm for automatic detection and identification of edges in an EELS spectrum is presented. It has the following features: 1) it compresses the dynamic range of EELS spectra and enhances the ionization edge signals via difference transforms, 2) it removes residual background, thereby isolating sharp features associated with the edge thresholds and noise, 3) it distinguishes true edge-threshold features from noise via statistical analysis. In addition to paving the way for rapid, automated EELS elemental analysis, the algorithm is capable of detecting edges which are easily overlooked by human analysts.

引用

页码：245 / 256

页数：12

共 6 条

[1]

Ahn C.C., 1983, EELS ATLAS

[2] REEVALUATION OF X-RAY ATOMIC ENERGY LEVELS [J].