ANNEALING BEHAVIOR OF HYDROGEN TRAPS IN NE-IMPLANTED TA

被引:22
作者
KEINONEN, J
KARTTUNEN, V
RAISANEN, J
BERGMEISTER, FJ
LUUKKAINEN, A
TIKKANEN, P
机构
来源
PHYSICAL REVIEW B | 1986年 / 34卷 / 12期
关键词
D O I
10.1103/PhysRevB.34.8981
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:8981 / 8984
页数:4
相关论文
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