RECENT PROGRESS IN MICROMACHINING AND APPLICATIONS TO MICROACTUATORS

被引：13

作者：

FUJITA, H

机构：

[1] Institute of Industrial Science, The University of Tokyo, Minato-ku, okyo, 106

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 12B期

关键词：

MICROELECTROMECHANICAL SYSTEMS; MEMS; MICROMACHINE; MICROACTUATOR; SEMICONDUCTOR PROCESS;

D O I：

10.1143/JJAP.33.7163

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The successful fabrication and operation of microactuators and micromechanical parts by IC-based micromachining technology has provided the opportunity to produce microelectromechanical systems (MEMS) or micromachines. This paper deals with the recent progress in micromachining processes and microactuators fabricated by them. A system architecture suitable for MEM and applications of MEMS are also discussed.

引用

页码：7163 / 7166

页数：4

共 15 条

[1]

AKAMINE S, 1990, SENSOR ACTUATOR, V21, P964

[2]

ATAKA M, 1993, IEEE ASME J MICROELE, V2, P146

[3]

GUCKEL H, 1993, 7 INT C SOL STAT SEN, P76

[4]

HIRANO T, 1993, 7TH INT C SOL SENS A, P80

[5]

Howe R. T., 1991, IEEE SPECTRUM JUN, P29

[6]

IKUTA K, 1993, 1993 P MICR EL MECH, P42

[7]

KIM CJ, 1992, IEEE ASME J MICROELE, V1, P31

[8]

KONISHI S, 1993, IEEE ASME J MICROELE, V3, P54

[9]

MIYAZAKI S, 1994, 1994 P MEMS OIS, P176

[10] SILICON AS A MECHANICAL MATERIAL [J].

PETERSEN, KE .

PROCEEDINGS OF THE IEEE, 1982, 70 (05) :420-457

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