HIGH K BATIO3 FILMS FROM METALLOORGANIC PRECURSORS

被引:62
作者
XU, JJ
SHAIKH, AS
VEST, RW
机构
[1] PURDUE UNIV,TURNER LAB,W LAFAYETTE,IN 47907
[2] FERRO CORP,DIV ELECTR MAT,SANTA BARBARA,CA 93117
关键词
D O I
10.1109/58.19168
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
引用
收藏
页码:307 / 312
页数:6
相关论文
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