OPTIMIZATION OF THE DEPTH RESOLUTION IN ELASTIC RECOIL DETECTION

被引：41
作者：
PASZTI, F
SZILAGYI, E
KOTAI, E
机构：
[1] Central Research Institute for Physics, the Hungarian Academy of Sciences, H-1525 Budapest
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 54卷 / 04期
关键词：
D O I：
10.1016/0168-583X(91)95399-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Elastic recoil detection (ERD) by H-1(He-4, He-4)H-1 reaction is a fast, nondestructive method for depth profiling of hydrogen isotopes. The paper presents an experimental and theoretical study of the depth resolution under different conditions. A depth resolution of 10 nm can be achieved.
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收藏
页码：507 / 512
页数：6
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