DETERMINATION OF CONVERSION FACTOR FOR INFRARED MEASUREMENT OF OXYGEN IN SILICON

被引：81

作者：

IIZUKA, T

TAKASU, S

TAJIMA, M

ARAI, T

NOZAKI, T

INOUE, N

WATANABE, M

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 07期

关键词：

D O I：

10.1149/1.2114196

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1707 / 1713

页数：7

共 8 条

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[8] CONCENTRATION, SOLUBILITY, AND EQUILIBRIUM DISTRIBUTION COEFFICIENT OF NITROGEN AND OXYGEN IN SEMICONDUCTOR SILICON [J].

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