RESOLUTION ENHANCEMENT OF SECONDARY-ION MICROPROBE IMAGES USING FOURIER DECONVOLUTION

被引：2
|
作者：
WANG, H
VANESPEN, P
机构：
[1] Department of Chemistry, University of Antwerp (UIA), B-2610 Wilrijk
来源：
VACUUM | 1994年 / 45卷 / 04期
关键词：
D O I：
10.1016/0042-207X(94)90318-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
One of the digital image restoration methods, Fourier deconvolution, is applied to secondary ion microprobe images. The blurring observed in these images is caused by using a scanning primary ion beam with a finite beam size and can be corrected by this method. The signal to noise ratio of images is improved at the same time. This method seems to be very promising for improving the spatial resolution of a microscopic analysis method beyond the limits of the instrument.
引用
收藏
页码：447 / 450
页数：4
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