RADIATION-DAMAGE IN ION-MILLED SPECIMENS - CHARACTERISTICS, EFFECTS AND METHODS OF DAMAGE LIMITATION

The paper reviews the nature of radiation damage produced in inorganic target materials by sputtering with low-energy ion and atom beams, both in general and for particular types of solid. The various effects are considered in relation to the preparation of TEM specimens by beam-milling. The present state of knowledge is reviewed concerning the effects of particle energy and species, angle of beam incidence, specimen type, specimen temperature, etc., on internal microstructure and surface topography. Ways of minimising the effects of radiation damage during the preparation of TEM specimens by beam-milling are summarised.