A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS

被引：154

|

作者：

BROMLEY, EI

RANDALL, JN

FLANDERS, DC

MOUNTAIN, RW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582744

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1364 / 1366

页数：3

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