LOW-PRESSURE NITRIDED-OXIDE AS A THIN GATE DIELECTRIC FOR MOSFETS

被引：65

作者：

WONG, SS ^{[1
]}

SODINI, CG ^{[1
]}

EKSTEDT, TW ^{[1
]}

GRINOLDS, HR ^{[1
]}

JACKSON, KH ^{[1
]}

KWAN, SH ^{[1
]}

OLDHAM, WG ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,BERKELEY,CA 94720

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 05期

关键词：

D O I：

10.1149/1.2119904

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1139 / 1144

页数：6

共 17 条

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