THE VELOCITY DISTRIBUTION OF SPUTTERED ZR ATOMS FOR IRRADIATION AT NORMAL AND OBLIQUE ANGLE OF INCIDENCE

被引:28
作者
BERRES, W [1 ]
BAY, HL [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, EURATOM, INST PLASMAPHYS, D-5170 JULICH 1, FED REP GER
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 33卷 / 04期
关键词
D O I
10.1007/BF00614664
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:235 / 241
页数:7
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