ION-INDUCED SECONDARY-ELECTRON EMISSION FROM MGO FILMS

被引:30
作者
CHOU, NJ [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期
关键词
D O I
10.1116/1.569148
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:307 / 311
页数:5
相关论文
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