FORMATION OF DOUBLE DIELECTRIC LAYERS (AL2O3/SIO2) ON SILICON BY DC PLASMA ANODIZATION

被引：2
作者：
BECK, RB
JAKUBOWSKI, A
机构：
来源：
THIN SOLID FILMS | 1982年 / 97卷 / 01期
关键词：
D O I：
10.1016/0040-6090(82)90417-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：63 / 67
页数：5
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