THE APPLICATION OF SECONDARY ION MASS-SPECTROMETRY TO SURFACE-ANALYSIS OF SEMICONDUCTOR SUBSTRATES AND DEVICES

被引：12
作者：
BROWN, A
VANDENBERG, JA
VICKERMAN, JC
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1986年 / 9卷 / 1-6期
关键词：
D O I：
10.1002/sia.740090508
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：309 / 317
页数：9
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