THE INFLUENCE OF DISCHARGE CURRENT ON THE INTRINSIC STRESS IN MO FILMS DEPOSITED USING CYLINDRICAL AND PLANAR MAGNETRON SPUTTERING SOURCES

被引：174
作者：
THORNTON, JA
HOFFMAN, DW
机构：
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] FORD MOTOR CO,RES STAFF,DEARBORN,MI 48121
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.572997
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：576 / 579
页数：4
相关论文
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