BUFFER-LAYER TECHNIQUE FOR THE GROWTH OF SINGLE-CRYSTAL SIC ON SI

被引：131

作者：

ADDAMIANO, A

SPRAGUE, JA

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.94820

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：525 / 527

页数：3

共 12 条

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[2]

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[3]

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APPLIED PHYSICS LETTERS, 1983, 42 (05) :460-462

[7] CHEMICAL VAPOR-DEPOSITION OF SINGLE-CRYSTALLINE ZNO FILM WITH SMOOTH SURFACE ON INTERMEDIATELY SPUTTERED ZNO THIN-FILM ON SAPPHIRE [J].

OHNISHI, S ;

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SHIOSAKI, T ;

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JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (05) :773-778

[8] THERMAL-EXPANSION OF SOME DIAMOND-LIKE CRYSTALS [J].

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[9]

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[10]

SPRAGUE JA, 1975, 33RD P M EL MICR SOC, P162

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