MECHANICAL ABERRATIONS OF A MAGNETIC QUADRUPOLE QUADRUPLET LENS

被引:8
作者
KAWAKATSU, H
VOSBURGH, KG
SIEGEL, BM
机构
[1] Department of Engineering Physics, Cornell University, Ithaca, NY
关键词
D O I
10.1063/1.1655741
中图分类号
O59 [应用物理学];
学科分类号
摘要
The mechanical aberrations of a system of two or more magnetic quadrupoles have been studied. Displacement, rotation, and tilting of one quadrupole, and the effects of radial and rotational errors in alignment of one pole are considered as well as the inhomogeneity of the material used in the system. The changes in field distribution introduced by these errors are calculated and the corresponding aberration formulas are derived. As a particular case, the mechanical aberrations of a quadruplet projector, are computed. The construction tolerances are estimated for an allowable image defect (magnification error) of 3% in the radial and rotatinoal directions. The calculations indicate that the projector system can be used in an electron microscope without excessive image defects. The image is most sensitive to rotational misalignment with a required tolerance of ±2×10-3 rad. © 1968 The American Institute of Physics.
引用
收藏
页码:255 / +
页数:1
相关论文
共 16 条
  • [1] BLEWETT JP, 1959, JPB11 BROOKH
  • [2] DELTRAP JHM, 1964, P C ELECTRONIC MICRO
  • [3] DELTRAP JMH, 1964, THESIS CAMBRIDGE
  • [4] DHUICQ D, 1959, CR HEBD ACAD SCI, V249, P2031
  • [5] DHUICQ D, 1965, COLLOQUE ANNUAL SMFE
  • [6] DYMNIKOV AD, 1965, SOV PHYS-TECH PHYS, V10, P3
  • [7] DYMNIKOV AD, 1965, ZH TEKH FIZ, V35, P3
  • [8] GRIVET P, 1958, CERN5825
  • [9] Hawkes P. W., 1963, THESIS CAMBRIDGE
  • [10] HAWKES PW, 1965, OPTIK, V22, P349