THE EFFECT OF HEAVY-ION BOMBARDMENT ON THE PROPERTIES OF HARD A-C-H(I-C) FILMS

被引：42

作者：

ZOU, JW

SCHMIDT, K

REICHELT, K

STRITZKER, B

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.575481

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3103 / 3104

页数：2

共 8 条

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