MEASUREMENT OF STRESS GRADIENTS GENERATED BY ELECTROMIGRATION

被引：120

作者：

BLECH, IA ^{[1
]}

TAI, KL ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 08期

关键词：

D O I：

10.1063/1.89414

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：387 / 389

页数：3

共 12 条

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BLECH, IA .

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[8] CURRENT-INDUCED MASS TRANSPORT IN ALUMINUM [J].

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[10]

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