GROWTH OF HYDROGENATED GERMANIUM MICRO-CRYSTAL BY REACTIVE SPUTTERING

被引:13
作者
IMURA, T [1 ]
TASHIRO, M [1 ]
OHBIKI, T [1 ]
TERAUCHI, H [1 ]
HIRAKI, A [1 ]
TSUJI, K [1 ]
MINOMURA, S [1 ]
机构
[1] UNIV TOKYO,INST SOLID STATE PHYS,TOKYO 106,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 08期
关键词
D O I
10.1143/JJAP.22.L505
中图分类号
O59 [应用物理学];
学科分类号
摘要
Semiconducting germanium
引用
收藏
页码:L505 / L507
页数:3
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