RELIABLE SUBMICRON PRESSURE READINGS WITH CAPACITANCE MANOMETER

被引：82
作者：
UTTERBACK, NG
GRIFFITH, T
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1966年 / 37卷 / 07期
关键词：
D O I：
10.1063/1.1720349
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：866 / +
页数：1
相关论文
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