HEAT-FLOW CALCULATION OF PULSED EXCIMER ULTRAVIOLET-LASERS MELTING OF AMORPHOUS AND CRYSTALLINE SILICON SURFACES

被引:22
作者
ONG, CK
SIN, EH
TAN, HS
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D O I
10.1364/JOSAB.3.000812
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:812 / 814
页数:3
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