MULTISTAGE DRY PUMPS

被引:0
作者
BURGER, HD [1 ]
ROSSMANITH, E [1 ]
CRINQUETTE, JM [1 ]
TABERLET, M [1 ]
机构
[1] ALCATEL CIT,DIV VIDE & MECAN,F-74000 ANNECY,FRANCE
关键词
D O I
10.1016/0042-207X(90)94103-W
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Dry vacuum pumps actually are not en vogue, but can solve a lot of problems in metallurgical, chemical and biomechanical processes. Some types of dry pumps, developed for pressures below some mbar, which use claw type rotors, are compared to multistage pumps with roots type rotors. Applications at pressures up to 100 mbar and more, in continuous service and for processes involving liquids, are discussed. Results of 3-, 4- and 5-stage configurations with and without gas-ejectors are presented, amongst them pump configurations with continuous working pressures of 10(-3)-10(3) mbar.
引用
收藏
页码:1822 / 1824
页数:3
相关论文
共 2 条
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WANKEL F, 1963, EINTEILUNG ROTATIONS, P2
[2]   MECHANICAL HIGH-VACUUM PUMPS WITH AN OIL-FREE SWEPT VOLUME [J].
WYCLIFFE, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2608-2611