MECHANISM OF ION-BEAM INDUCED MIXING OF LAYERED SOLIDS

被引：64
|
作者：
SIGMUND, P
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1983年 / 30卷 / 01期
关键词：
D O I：
10.1007/BF00617712
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：43 / 46
页数：4
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