ELECTRON-BEAM TOMOGRAPHY OF MAGNETIC RECORDING HEAD FIELDS

被引:6
|
作者
FERRIER, RP [1 ]
LIU, Y [1 ]
MARTIN, JL [1 ]
ARNOLDUSSEN, TC [1 ]
机构
[1] IBM CORP,DIV STORAGE SYST,SAN JOSE,CA 95193
关键词
Air bearing surface - Backscattered electron imaging - Differential phase contrast mode - Electron beam deflection - Electron beam tomography - Kerr optical microscopy - Lorentz electron microscopy - Magnetic recording head fields - Radom transform method;
D O I
10.1016/0304-8853(95)00304-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The quantitative evaluation of the 3D form of the magnetic field from a thin film recording head has been achieved by electron beam tomography. The data sets for tomographic reconstruction were obtained using the differential phase contrast mode of Lorentz electron microscopy applied in a 200 kV (scanning) transmission instrument. The high accelerating voltage and a novel method of mounting the head in the microscope offer advantages over previous experiments. The two reconstruction algorithms, which have been used previously, have been implemented and the results of their application are compared for theoretical data derived from a model head field and for data obtained experimentally from a production recording head.
引用
收藏
页码:387 / 397
页数:11
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