TUNING A BABINET-SOLEIL COMPENSATOR FOR EXACT QUARTER WAVE RETARDATION IN AN ELLIPSOMETER

被引：4
作者：
AZZAM, RMA
KRUEGER, JA
机构：
[1] UNIV NEBRASKA,COLL MED,HEMATOL DIV,OMAHA,NB 68105
[2] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1975年 / 8卷 / 06期
关键词：
D O I：
10.1088/0022-3735/8/6/002
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：445 / 446
页数：2
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[1]   UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&
[2]   CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) :1118-&
[3]   MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].
MCCRACKIN, FL ;
PASSAGLIA, E ;
STROMBERG, RR ;
STEINBERG, HL .
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+
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