ENHANCED COHESION OF PHOTO-OXYGENATED FULLERENE FILMS - A NEW OPPORTUNITY FOR LITHOGRAPHY

被引：39

作者：

HEBARD, AF

EOM, CB

FLEMING, RM

CHABAL, YJ

MULLER, AJ

GLARUM, SH

PIETSCH, GJ

HADDON, RC

MUJSCE, AM

PACZKOWSKI, MA

KOCHANSKI, GP

机构：

[1] AT and T Bell Laboratories, Murray Hill, 07974, NJ

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 57卷 / 03期

关键词：

D O I：

10.1007/BF00332606

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The irradiation of sublimed fullerene (C60 and C70) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the photo-transformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated C60 retains its fcc crystal structure but with a substantial fraction of the C60 molecules modified with carbonyl (C=O) bonds.

引用

页码：299 / 303

页数：5

共 19 条

[1] VAPOR-PRESSURE OF BUCKMINSTERFULLERENE [J].

ABREFAH, J ;

OLANDER, DR ;

BALOOCH, M ;

SIEKHAUS, WJ .

APPLIED PHYSICS LETTERS, 1992, 60 (11) :1313-1314

[2] PHOTOPHYSICAL PROPERTIES OF C60 [J].

ARBOGAST, JW ;

DARMANYAN, AP ;

FOOTE, CS ;

RUBIN, Y ;

DIEDERICH, FN ;

ALVAREZ, MM ;

ANZ, SJ ;

WHETTEN, RL .

JOURNAL OF PHYSICAL CHEMISTRY, 1991, 95 (01) :11-12

[3] INTERCALATION OF MOLECULAR-SPECIES INTO THE INTERSTITIAL SITES OF FULLERENE [J].

ASSINK, RA ;

SCHIRBER, JE ;

LOY, DA ;

MOROSIN, B ;

CARLSON, GA .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (08) :2136-2143

[4] REACTIVITY OF C60 IN PURE OXYGEN [J].

CHEN, HS ;

KORTAN, AR ;

HADDON, RC ;

KAPLAN, ML ;

CHEN, CH ;

MUJSCE, AM ;

CHOU, H ;

FLEMING, DA .

APPLIED PHYSICS LETTERS, 1991, 59 (23) :2956-2958

[5] SYNTHESIS AND CHARACTERIZATION OF (C60)O, THE 1ST FULLERENE EPOXIDE [J].

CREEGAN, KM ;

ROBBINS, JL ;

ROBBINS, WK ;

MILLAR, JM ;

SHERWOOD, RD ;

TINDALL, PJ ;

COX, DM ;

SMITH, AB ;

MCCAULEY, JP ;

JONES, DR ;

GALLAGHER, RT .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (03) :1103-1105

[6] THE INFLUENCE OF OXYGEN ON THE RAMAN-SPECTRUM OF C60 FILMS [J].

DUCLOS, SJ ;

HADDON, RC ;

GLARUM, SH ;

HEBARD, AF ;

LYONS, KB .

SOLID STATE COMMUNICATIONS, 1991, 80 (07) :481-484

[7] FABRICATION AND PROPERTIES OF FREESTANDING C60 MEMBRANES [J].

EOM, CB ;

HEBARD, AF ;

TRIMBLE, LE ;

CELLER, GK ;

HADDON, RC .

SCIENCE, 1993, 259 (5103) :1887-1890

[8] DEPOSITION AND CHARACTERIZATION OF FULLERENE FILMS [J].

HEBARD, AF ;

HADDON, RC ;

FLEMING, RM ;

KORTAN, AR .

APPLIED PHYSICS LETTERS, 1991, 59 (17) :2109-2111

[9] ORIENTATIONAL ORDERING TRANSITION IN SOLID C60 [J].

HEINEY, PA ;

FISCHER, JE ;

MCGHIE, AR ;

ROMANOW, WJ ;

DENENSTEIN, AM ;

MCCAULEY, JP ;

SMITH, AB ;

COX, DE .

PHYSICAL REVIEW LETTERS, 1991, 66 (22) :2911-2914

[10] C60H2 - SYNTHESIS OF THE SIMPLEST C60 HYDROCARBON DERIVATIVE [J].

HENDERSON, CC ;

CAHILL, PA .

SCIENCE, 1993, 259 (5103) :1885-1887

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