GROWTH OF ALPHA-AL2O3 FILMS BY MOLECULAR LAYER EPITAXY

被引：20

作者：

OYA, G

YOSHIDA, M

SAWADA, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 15期

关键词：

D O I：

10.1063/1.98765

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1143 / 1145

页数：3

共 9 条

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[7] HIGH-QUALITY SINGLE-CRYSTAL NB FILMS AND INFLUENCES OF SUBSTRATES ON THE EPITAXIAL-GROWTH [J].

OYA, G ;

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JOURNAL OF APPLIED PHYSICS, 1986, 60 (04) :1440-1446

[8]

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[9]

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