ROLE OF HYDROGEN IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：0
|
作者：
MEZDROGINA, MM
GOLIKOVA, OA
KUDOYAROVA, VK
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来源：
INORGANIC MATERIALS | 1986年 / 22卷 / 04期
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：599 / 600
页数：2
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