ROLE OF HYDROGEN IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：0

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作者：

MEZDROGINA, MM

GOLIKOVA, OA

KUDOYAROVA, VK

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来源：

INORGANIC MATERIALS | 1986年 / 22卷 / 04期

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T [工业技术];

学科分类号：

08 ;

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页码：599 / 600

页数：2

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