PLASMOCHEMICAL PRECIPITATION OF THIN-FILMS IN FREELY LOCALIZED PULSE MICROWAVE-DISCHARGE

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作者：
BATANOV, GM
BOLSHAKOV, EF
VORONIN, AN
GORBUNOV, AA
DOROFEYUK, AA
KONOV, VI
KOSSYI, IA
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ZHURNAL TEKHNICHESKOI FIZIKI | 1993年 / 63卷 / 06期
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O59 [应用物理学];
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页码：87 / 95
页数：9
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