PERFORMANCE-CHARACTERISTICS OF THE ARF EXCIMER LASER USING A LOW-PRESSURE ARGON-RICH MIXTURE

被引：12

作者：

SUDA, A

OBARA, M

NOGUCHI, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 10期

关键词：

D O I：

10.1063/1.337547

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3791 / 3793

页数：3

共 19 条

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